✦ LIBER ✦
A process-compatible electron beam direct write system : W. R. Livesay, J. S. Greeneich, J. E. Wolfe and R. J. Felker. Solid St. Technol. 137 (September 1983)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 132 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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