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Direct patterning of silicon oxide on Si-substrate induced by femtosecond laser

✍ Scribed by Kiani, Amirkianoosh; Venkatakrishnan, Krishnan; Tan, Bo

Book ID
115412680
Publisher
Optical Society of America
Year
2010
Tongue
English
Weight
218 KB
Volume
18
Category
Article
ISSN
1094-4087

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## Abstract Laser Induced Forward Transfer (LIFT) technique is a direct‐write method allowing the effective deposition of a wide range of materials with high spatial resolution. In this work, we present the direct printing of microarrays from a biotin solution by using a Nd:YAG laser (266 nm wavele