Direct pattern transfer for sub-45 nm features using nanoimprint lithography

✍ Scribed by Ngoc V. Le; William J. Dauksher; Kathy A. Gehoski; Kevin J. Nordquist; Eric Ainley; Pawitter Mangat

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 200 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.254