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Direct Measurement of Electron Beam Scattering in the Low Vacuum SEM

✍ Scribed by Belkorissat, Redouane ;Kadoun, Ab ed daim ;Dupeyrat, Marc ;Khelifa, Brahim ;Mathieu, Christian

Book ID: 106196362
Publisher: Springer-Verlag
Year: 2004
Weight: 244 KB
Volume: 147
Category: Article
ISSN: 0344-838X
DOI: 10.1007/s00604-004-0182-x

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