Laser-driven high-resolution patterning
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Hyunkwon Shin; Boyeon Sim; Myeongkyu Lee
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Article
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2010
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Elsevier Science
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English
β 975 KB
We here introduce a laser-driven process to pattern transparent thin films on transparent substrates. This method utilizes a pre-patterned metal film as the dynamic release layer and the transparent thin film is selectively removed by a thermo-elastic force laser-induced in the underlying metal laye