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Direct laser generation of large field high resolution thin metal film patterns

✍ Scribed by Townsend, W.; Zaleckas, V.; Muniz, J.


Book ID
119794512
Publisher
IEEE
Year
1979
Tongue
English
Weight
667 KB
Volume
15
Category
Article
ISSN
0018-9197

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We here introduce a laser-driven process to pattern transparent thin films on transparent substrates. This method utilizes a pre-patterned metal film as the dynamic release layer and the transparent thin film is selectively removed by a thermo-elastic force laser-induced in the underlying metal laye