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Direct gas-phase synthesis of single-phase β-FeSi2nanoparticles

✍ Scribed by Bywalez, Robert; Orthner, Hans; Mehmedovic, Ervin; Imlau, Robert; Kovacs, Andras; Luysberg, Martina; Wiggers, Hartmut

Book ID
120883261
Publisher
Springer Netherlands
Year
2013
Tongue
English
Weight
730 KB
Volume
15
Category
Article
ISSN
1388-0764

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Single-phase semiconducting iron disilicide (b-FeSi 2 ) films on silicon substrate were fabricated by electron beam evaporation (EBE) technique. For preventing the oxidation of Fe film, silicon/iron/silicon sandwich structure films with different thickness of silicon and iron were deposited and then