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Direct current bias effects in RF induction thermal plasma diamond CVD

✍ Scribed by Berghaus, J.O.; Meunier, J.-L.; Gitzhofer, F.

Book ID: 121256500
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 309 KB
Volume: 30
Category: Article
ISSN: 0093-3813
DOI: 10.1109/TPS.2002.1003894

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