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Dip-coating method for fabricating thin photoresist films

✍ Scribed by Mauro Gibson; Jaime Frejlich; Roberto Machorro

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 461 KB
Volume: 128
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90344-x

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