Difractometric Investigations into the Influence of Conditions of Diamond Film Growth on Silicon Monocrystals
β Scribed by P. I. Ignatenko; I. V. Sel'skaya
- Book ID
- 110389621
- Publisher
- Springer
- Year
- 2002
- Tongue
- English
- Weight
- 201 KB
- Volume
- 45
- Category
- Article
- ISSN
- 1573-9228
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π SIMILAR VOLUMES
The effect of the inclusion of silicon atoms in the network of diamond-like carbon (amorphous carbon and hydrogenated amorphous carbon) is studied. Samples of amorphous hydrogenated CSi are deposited by means of a sputter-assisted plasma chemical vapour deposition system in which a carbon target is
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