Diffusion redistribution of zinc during the doping of structurally inhomogeneous epitaxial layers of gallium phosphide

Influence of inhomogeneity and nonlinear

Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth

✍ E.L. Pankratov 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 659 KB

We analyze dopant dynamics in δ-doped layer of a multilayer structure during growth of an overlayer. We present an explanation of asymmetrization of dopant distribution, which has recently been shown systematically by experiment [A.M. Nazmul, S. Sugahara, M. Tanaka, J. Crystal Growth 251 ( 2003) 303