Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth

✍ Scribed by E.L. Pankratov

• Book ID: 104070194
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 659 KB
• Volume: 11
• Category: Article
• ISSN: 1468-1218
• DOI: 10.1016/j.nonrwa.2009.02.028

✦ Synopsis

We analyze dopant dynamics in δ-doped layer of a multilayer structure during growth of an overlayer. We present an explanation of asymmetrization of dopant distribution, which has recently been shown systematically by experiment [A.M. Nazmul, S. Sugahara, M. Tanaka, J. Crystal Growth 251 ( 2003) 303]. Spreading of a δ-layer of Mn, sputtered on the structure GaAs/InGaAs/GaAs, have been estimated for overlayer of GaAs.