Diffusion of substitutional impurities in silicon at short oxidation times: An insight into point defect kinetics

✍ Scribed by Antoniadis, D. A.; Moskowitz, I.

• Book ID: 118127859
• Publisher: American Institute of Physics
• Year: 1982
• Tongue: English
• Weight: 882 KB
• Volume: 53
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.330067