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Diffusion of iron in the silicon dioxide layer of silicon-on-insulator structures

✍ Scribed by Kononchuk, O.; Korablev, K. G.; Yarykin, N.; Rozgonyi, G. A.


Book ID
121849832
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
306 KB
Volume
73
Category
Article
ISSN
0003-6951

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