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Anodization of nanoscale Si layers in silicon-on-insulator structures

✍ Scribed by V. A. Antonov; E. V. Spesivtsev; I. E. Tyschenko

Book ID
111444994
Publisher
Springer
Year
2011
Tongue
English
Weight
190 KB
Volume
45
Category
Article
ISSN
1063-7826

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