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Diffusion of dopants in tungsten disilicide: effects of diffusion paths

✍ Scribed by O. Thomas; G. Scilla; P. Gas; J. Cotte; R.V. Joshi; M. Bakli; G. Göltz; F.M. d'Heurle


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
533 KB
Volume
53
Category
Article
ISSN
0169-4332

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