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Diffusion in semiconductor superlattices: decay of dopant concentration profiles

✍ Scribed by F. Srobár

Book ID
112569539
Publisher
Springer
Year
1983
Tongue
English
Weight
435 KB
Volume
33
Category
Article
ISSN
0011-4626

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Density functional theory studies have been performed to investigate the mechanisms of self-diffusion in Ge and the clustering of B in Si. In the case of self-diffusion of Ge, we find within the harmonic transition state theory a diffusion prefactor for the vacancy mechanism which is in good agreeme