Diffusion characteristics of antimony and phosphorus spin-on sources: P.M. Prasad and V. P. Sundarsingh Microelectron. J. 14 (1), 49 (1983)

• Book ID: 104157382
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 96 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(85)80236-6