Diffusion characteristics of antimony and phosphorus spin-on sources : P. M. Prasad and V. P. Sundarsingh. Microelectron. J.14 (1), 49 (1983)

• Book ID: 103277722
• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 130 KB
• Volume: 23
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(83)90928-9