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Diffusion annealing of Mo/MoSi2 couple and silicon diffusivity in Mo5Si3 layer

✍ Scribed by H.A. Chatilyan; S.L. Kharatyan; A.B. Harutyunyan


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
641 KB
Volume
459
Category
Article
ISSN
0921-5093

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