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Diffusion and clustering of supersaturated carbon in SiGeC layers under oxidation

✍ Scribed by E Napolitani; D De Salvador; A Coati; M Berti; A.V Drigo; M.S Carroll; J.C Sturm; J Stangl; G Bauer; C Spinella


Book ID
114165154
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
316 KB
Volume
186
Category
Article
ISSN
0168-583X

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