✦ LIBER ✦
TSUPREM-4 based modeling of boron and carbon diffusion in SiGeC base layers under rapid thermal annealing conditions
✍ Scribed by Arturo Sibaja-Hernandez; Ming Wei Xu; Stefaan Decoutere; Herman Maes
- Book ID
- 103846335
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 314 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1369-8001
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