Diffuse x-ray scattering study of the formation of microdefects in heat-treated dislocation-free large-diameter silicon wafers

✍ Scribed by V. T. Bublik; S. Yu. Matsnev; K. D. Shcherbachev; M. V. Mezhennyi; M. G. Mil’vidskii; V. Ya. Reznik

• Book ID: 110135850
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2003
• Tongue: English
• Weight: 138 KB
• Volume: 45
• Category: Article
• ISSN: 1063-7834
• DOI: 10.1134/1.1620095