Difficulty for oxygen to incorporate into the silicon network during initial O[sub 2] oxidation of Si(100)-(2×1)

✍ Scribed by Hemeryck, A.; Mayne, A. J.; Richard, N.; Estève, A.; Chabal, Y. J.; Djafari Rouhani, M.; Dujardin, G.; Comtet, G.

• Book ID: 111680827
• Publisher: American Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 594 KB
• Volume: 126
• Category: Article
• ISSN: 0021-9606
• DOI: 10.1063/1.2566299