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Dielectric property and conduction mechanism of ultrathin zirconium oxide films

✍ Scribed by Chang, J. P.; Lin, Y.-S.


Book ID
121692238
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
368 KB
Volume
79
Category
Article
ISSN
0003-6951

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Dielectric and conduction properties of
✍ S Muruganand; Sa K Narayandass; D Mangalaraj; Tβ€ŠM Vijayan πŸ“‚ Article πŸ“… 2001 πŸ› John Wiley and Sons 🌐 English βš– 129 KB

## Abstract Capacitors with an Al–polyimide–Al sandwich film structure have been fabricated: the top and the bottom aluminium electrodes were deposited by vacuum evaporation and the polyimide film was deposited by an isothermal immersion method. An X‐ray diffractogram of the film indicates the amor