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Dielectric properties of single crystals of Al2O3 , LaAlO3, NdGaO3, SrTiO3, and MgO at cryogenic temperatures

✍ Scribed by Krupka, J.; Geyer, R.G.; Kuhn, M.; Hinken, J.H.


Book ID
114551951
Publisher
IEEE
Year
1994
Tongue
English
Weight
475 KB
Volume
42
Category
Article
ISSN
0018-9480

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Sputter deposition of epitaxial Y1Ba2Cu3
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Thin films of Y1Ba2Cu30~have been prepared by sputter deposition. The sputter parameters like gas pressure, gas mixture, distance target-substrate and deposition temperature h.ave been varied in oroer to find optimum contritions tor, epitaxi~l film growth. Witl~ optimum conditions Te > 90 K and crit