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Dielectric properties of DC reactive magnetron sputtered Al2O3 thin films

✍ Scribed by Prasanna S.; Mohan Rao G.; Jayakumar S.; Kannan M.D.; Ganesan V.

Book ID
113937475
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
902 KB
Volume
520
Category
Article
ISSN
0040-6090

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