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Dielectric properties of anodic tantalum oxide grown on sputtered tantalum nitride

✍ Scribed by A. Climent; J.M. Martínez-Duart; C. Palacio

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 335 KB
Volume: 58
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(79)90263-3

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