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Dielectric properties of amorphous aluminium phosphate thin films

โœ Scribed by S. Daviero; C. Avinens; A. Ibanez; J.C. Giuntini; E. Philippot


Book ID
117147354
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
400 KB
Volume
146
Category
Article
ISSN
0022-3093

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Deposits of dielectric gallium phosphate thin films on silicon and gallium arsenide semiconductors have been obtained by pyrolysis of an aerosol produced by ultrasonic spraying (''pyrosol'' process) and containing the organometallic precursors gallium acetylacetonate and tributyl phosphate. The comp