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Dielectric Porous Layer Formation in Si and Si/Ge by Local Stain Etching

✍ Scribed by Starkov, V.V. ;Starostina, E.A. ;Vyatkin, A.F. ;Volkov, V.T.

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 122 KB
Volume: 182
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200011)182:1<93::aid-pssa93>3.0.co;2-8

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