Diamond-like carbon films as piezoresistors in highly sensitive force sensors

✍ Scribed by Petersen, M.; Bandorf, R.; Bräuer, G.; Klages, C.-P.

• Book ID: 122501315
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 602 KB
• Volume: 26
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2012.04.004