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Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics
✍ Scribed by V. Yanev; M. Rommel; M. Lemberger; S. Petersen; B. Amon; T. Erlbacher; A. J. Bauer; H. Ryssel; A. Paskaleva; W. Weinreich; C. Fachmann; J. Heitmann; U. Schroeder
- Book ID
- 125899194
- Publisher
- American Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 562 KB
- Volume
- 92
- Category
- Article
- ISSN
- 0003-6951
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