𝔖 Bobbio Scriptorium

✦ LIBER ✦

Diamond and hard carbon films for microelectromechanical systems (MEMS)—a nanotribological study

✍ Scribed by Ian S. Forbes; John I.B. Wilson

Book ID: 114085517
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 423 KB
Volume: 420-421
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(02)00854-4

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