✦ LIBER ✦

Diagnostics of plasma processes in micro- and nanoelectronics

✍ Scribed by K. V. Rudenko

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electroless processes for micro- and nan

✍ Yosi Shacham-Diamand; A Inberg; Y Sverdlov; V Bogush; N Croitoru; H Moscovich; A 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 482 KB

Diagnostics of Collisionless Processes i

✍ Skiff, F. 📂 Article 📅 2006 🏛 IEEE 🌐 English ⚖ 566 KB

Diagnostics and modeling of silane and m

✍ Dr. Paul B. Davies; Dr. Philip M. Martineau 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 840 KB

Plasma diagnostic of ion and plasma PVD

✍ G.N. Strauss; H.K. Pulker 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 342 KB

Excited atoms and molecules in physicoch

✍ D. I. Slovetskii 📂 Article 📅 2009 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 251 KB

Process diagnostics in suspension plasma

✍ Georg Mauer; Alexandre Guignard; Robert Vaßen; Detlev Stöver 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 878 KB