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Diagnosis of Active Species in Reactive Acetylene Plasma by Laser-Ionization Molecular-Beam Time-of-Flight Mass Spectrometry

✍ Scribed by Chunlei Feng; Liping Wang; Yan Wang; Liang Gao; Hongbin Ding

Book ID: 106491095
Publisher: Springer
Year: 2011
Tongue: English
Weight: 453 KB
Volume: 31
Category: Article
ISSN: 0272-4324
DOI: 10.1007/s11090-011-9295-2

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