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Developments and trends in semiconductor single-crystal technology

✍ Scribed by C. Paorici


Book ID
113299078
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
927 KB
Volume
9
Category
Article
ISSN
0254-0584

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πŸ“œ SIMILAR VOLUMES


Single dopant diffusion in semiconductor
✍ A. Glitzky; W. Merz πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 177 KB

## Abstract The paper deals with the analysis of pair diffusion models in semiconductor technology. The underlying model contains reaction‐drift‐diffusion equations for the mobile point defects and dopant‐defect pairs as well as reaction equations for immobile dopants which are coupled with a non‐l