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Development, production, and investigation of PMMA-based X-ray compound refractive lenses

✍ Scribed by A. N. Artemev; N. A. Artemev; B. F. Kirillov; V. V. Kvardakov; A. V. Zabelin; A. B. Lastochkin; A. G. Maevsky; O. V. Naida; A. A. Dyatlov; A. A. Stein


Book ID
110167465
Publisher
Springer
Year
2007
Tongue
English
Weight
226 KB
Volume
50
Category
Article
ISSN
0020-4412

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## Abstract Planar X‐ray refractive lenses with parabolic surface profile, and in crossed geometry to provide 2D focusing, are fabricated from SU‐8 polymer using the LIGA process and deep X‐ray lithography technology. A transmission X‐ray microscope (TXM) using a condenser and an objective lens bas