Investigation of phase contrast hard X-ray microscopy using planar sets of refractive crossed linear parabolic lenses made from SU-8 polymer
✍ Scribed by Reznikova, E. ;Weitkamp, T. ;Nazmov, V. ;Last, A. ;Simon, M. ;Saile, V.
- Book ID
- 105364366
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 574 KB
- Volume
- 204
- Category
- Article
- ISSN
- 0031-8965
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✦ Synopsis
Abstract
Planar X‐ray refractive lenses with parabolic surface profile, and in crossed geometry to provide 2D focusing, are fabricated from SU‐8 polymer using the LIGA process and deep X‐ray lithography technology. A transmission X‐ray microscope (TXM) using a condenser and an objective lens based on this type of X‐ray optics was set up at the ESRF beamline BM 5, for photon energies of 17.1 and 18 keV. Test structures made of gold and SU‐8, with different thicknesses, were imaged with this TXM using in‐line phase‐contrast, with X‐ray magnification factors of 13–20, spatial resolution between 0.2 and 0.3 µm and exposure times around 1 s. The advantages of a TXM based on refractive SU‐8 planar crossed condenser and objective and the optimisation of the optical scheme and of the condenser focusing profile are discussed. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)