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Development of micromachining technology in ion microbeam system at TIARA, JAEA

✍ Scribed by T. Kamiya; H. Nishikawa; T. Satoh; J. Haga; M. Oikawa; Y. Ishii; T. Ohkubo; N. Uchiya; Y. Furuta

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 728 KB
Volume: 67
Category: Article
ISSN: 0969-8043
DOI: 10.1016/j.apradiso.2008.06.021

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