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Development of lighting panel comprising light tube fabricated by LIGA process

โœ Scribed by Yoshitaka Sawa; Takanori Tanaka; Takeshi Kitadani; Hiroshi Ueno; Koichi Itoigawa; Kenji Yamashita; Daiji Noda; Tadashi Hattori


Book ID
106185467
Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
475 KB
Volume
14
Category
Article
ISSN
0946-7076

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โœ B.G. Goldenberg; V.F. Pindyurin; U.V. Ancharova; V.S. Eliseev; E.V. Petrova; V.P ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 240 KB

Application of X-ray lithography for fabrication medium-size (units-10 mm) microstructures with 3D-continuous-relief for optical needs is discussed. The method of production LIGA-masks without temporal masks is described. Also processing and preliminary results are presented.