Development of ion-beam technique for manufacturing silicon nanowires

✍ Scribed by B. A. Gurovich; K. E. Prikhod’ko; A. N. Taldenkov; A. Yu. Yakubovskii; K. I. Maslakov; D. A. Komarov; L. V. Kutuzov; G. E. Fedorov

• Book ID: 111858361
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2012
• Tongue: English
• Weight: 314 KB
• Volume: 7
• Category: Article
• ISSN: 1995-0780
• DOI: 10.1134/s1995078012010090