Development of expert decision model to monitor precision of solar silicon wafer machine line

✍ Scribed by Che-Wei Chang; Chung-Chih Chen

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 276 KB
• Volume: 59
• Category: Article
• ISSN: 0360-8352
• DOI: 10.1016/j.cie.2010.05.008

✦ Synopsis

In this study, we develop a two-stage decision model for managing uncertainty and imprecision of solar silicon wafer slicing evaluations during a wafer manufacturing process. Stage 1 is the evaluation process, which is performed by a procedure based on a combination of the fuzzy analytic hierarchy process (AHP) and the TOPSIS method. Stage 2 is the verification process, in which process capability indices are calculated to verify the feasibility and effectiveness of the proposed methods.