Development of enhanced depth-resolution technique for shallow dopant profiles

✍ Scribed by M. Fujita; J. Tajima; T. Nakagawa; S. Abo; A. Kinomura; F. Pászti; M. Takai; R. Schork; L. Frey; H. Ryssel

• Book ID: 114165519
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 156 KB
• Volume: 190
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)01248-4