Depth profiling of dopants implanted in Si using the synchrotron radiation based high-resolution grazing emission technique

✍ Scribed by Y. Kayser; D. Banaś; W. Cao; J.-Cl. Dousse; J. Hoszowska; P. Jagodziński; M. Kavčič; A. Kubala-Kukuś; S. Nowak; M. Pajek; J. Szlachetko

• Book ID: 112233328
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 789 KB
• Volume: 41
• Category: Article
• ISSN: 0049-8246
• DOI: 10.1002/xrs.2372