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Development of electron beam ion source for nanoprocess using highly charged ions

✍ Scribed by Makoto Sakurai; Fumiharu Nakajima; Takunori Fukumoto; Nobuyuki Nakamura; Shunsuke Ohtani; Shinro Mashiko; Hiroyuki Sakaue

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
224 KB
Volume
235
Category
Article
ISSN
0168-583X

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