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Development of Al-based multilayer optics for EUV

✍ Scribed by E. Meltchakov; C. Hecquet; M. Roulliay; S. De Rossi; Y. Menesguen; A. Jérome; F. Bridou; F. Varniere; M.-F. Ravet-Krill; F. Delmotte

Publisher
Springer
Year
2009
Tongue
English
Weight
410 KB
Volume
98
Category
Article
ISSN
1432-0630

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