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Development of a technique for thick carbon coatings with high deposition rates

โœ Scribed by Y. Sakai; H. Sinno; Y. Yamaguchi; M. Fujitsuka; T. Shikama; M. Okada

Book ID
107810179
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
638 KB
Volume
155-157
Category
Article
ISSN
0022-3115

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