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Development of a nuclear analytical technique for the analysis of ternary compounds (B + C + Si) and application to the optimization of a CVD process

✍ Scribed by G. Blondiaux; G. Ducouret; J.L. Debrun; S. Goujard; L. Van Den Bulcke


Book ID
113284033
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
281 KB
Volume
79
Category
Article
ISSN
0168-583X

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