Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography

✍ Scribed by Marko Vogler; Sabine Wiedenberg; Michael Mühlberger; Iris Bergmair; Thomas Glinsner; Holger Schmidt; Ernst-Bernhard Kley; Gabi Grützner

• Book ID: 108207746
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 473 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.01.184