A dual-curable transfer layer for adhesion enhancement of a multilayer UV-curable nanoimprint resist system

✍ Scribed by Xia, Dingfu; Ye, Liang; Guo, Xu; Cui, Yushuang; Zhang, Jizong; Yuan, Changsheng; Ge, Haixiong; Wu, Wei; Chen, Yanfeng

• Book ID: 113035135
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 609 KB
• Volume: 108
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-012-6911-9