Development of a new laser induced electron impact ionization source for studying the hot-wire chemical vapor deposition chemistry of silane–ammonia mixtures

✍ Scribed by Eustergerling, B. D.; Hedén, M.; Shi, Y. J.

• Book ID: 121013206
• Publisher: Royal Society of Chemistry
• Year: 2008
• Tongue: English
• Weight: 783 KB
• Volume: 23
• Category: Article
• ISSN: 0267-9477
• DOI: 10.1039/B809597C